Derivation of accurate tensor data of materials in SAW devices by solving a parameter identification problem using an enhanced eigenvalue analysis of an infinite array model

摘要

Accurate simulations of SAW elements require accurate material parameters. However, literature values, usually based on measurements of thick crystals, mostly don't reflect the properties of thin film layers used within SAW devices with the necessary precision. In this work, a parameter identification procedure is presented, which can determine these material parameters based on measurements of admittance curves of SAW resonators and wave velocities within SAW delay lines. The optimization problem is solved using a surrogate model, where the surrogate models are built up efficiently and reliably using a predictor / corrector technique utilizing several iterative FEM techniques.