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Performance analysis of X-Ray phase-contrast interferometers with respect to grating layouts

机译:光栅布局X射线相位对比器干涉仪的性能分析

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摘要

The grating-based phase-contrast imaging approach is highly dependent on the quality of the used gratings. While the fabrication of gratings for the soft X-ray range is more or less well controllable, the fabrication for the hard X-ray range (> 30 keV) is more challenging as the gratings must have high aspect ratios and thus fine structures. One of the best fabrication technologies for such gratings is LIGA (Lithography, Electroplating and Molding). However, due to such small structures and high aspect ratio it is unavoidable that the gratings become non-perfect and have deformations. Since the fabrication is complex, expensive and time consuming, a simple way is needed to assess the influence of such deformations on the signal and also a simple way to design and test new grating layouts. This work presents a simulation framework for X-ray phase-contrast imaging which allows to model, simulate and assess the quality of arbitrary grating layouts in an easier, cheaper and faster way. Furthermore, it allows the assessment of the quality of new grating layouts as well as of existing gratings.
机译:基于光栅的相位对比度成像方法高度依赖于所用光栅的质量。虽然软X射线范围的光栅的制造更大或更少可控制,但是硬X射线范围(&#003e; 30 kev)的制造更具挑战,因为光栅必须具有高纵横比,因此很好结构。这种光栅的最佳制造技术之一是LIGA(光刻,电镀和模制)。然而,由于这种小结构和高纵横比,光栅变得不完美并且具有变形是不可避免的。由于制造复杂,昂贵且耗时,因此需要一种简单的方法来评估这种变形对信号的影响以及设计和测试新光栅布局的简单方法。这项工作介绍了X射线相位对比度成像的仿真框架,其允许更容易,更便宜,更快地模拟,模拟和评估任意光栅布局的质量。此外,它允许评估新光栅布局的质量以及现有的光栅。

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