Holographic vector-wave femtosecond laser processing

摘要

Arbitrary and variable beam shaping of femtosecond pulses by a computer-generated hologram (CGH) displayed on a spatial light modulator (SLM) have been applied to femtosecond laser processing. The holographic femtosecond laser processing has been widely used in many applications such as two-photon polymerization, optical waveguide fabrication, fabrication of volume phase gratings in polymers, and surface nanostructuring. A vector wave that has a spatial distribution of polarization states control of femtosecond pulses gives good performances for the femtosecond laser processing. In this paper, an in-system optimization of a CGH for massively-parallel femtosecond laser processing, a dynamic control of spatial spectral dispersion to improve the focal spot shape, and the holographic vector-wave femtosecond laser processing are demonstrated.