Recent Developments in Desktop-Sized Machine Tools

摘要

The miniaturization of components and the functionalization via micro structures demands for flexible and economic manufacturing processes. Micro machining, i.e. micro milling and micro grinding can meet these requirements. In this paper, desktop-sized machine tools and their components that were developed at our institute are presented. With those machine tools, micro tools can be machined and used in one clamping, allowing for increased machining quality. Grooves milled with such machine tools achieve a bottom surface roughness below 10 nanometer.