Plasma-Surface Interactions for Materials Nanofabrication and Space Propulsion: A Unified Study for Technology Developments and Future Progress

摘要

A better understanding of plasma-surface interactions is indispensable for utilizing plasmas in hand. This paper presents an overview of the evolution of our understanding of several phenomena associated with plasma-surface interactions in the fields of materials nanofabrication and space propulsion. A numerical approach to reproduce plasma-surface interactions and profile evolution relies on a continuum model, discrete or Monte Carlo-based model, and also classical molecular dynamics simulation, to promote a unified study of the interactions for future technological developments.