An AFM-based test station has been established for rapid mechanical and electrical characterization of contacts in a micromechanical switch. A wide contact force range is accessible, from nN to mN, determined by the mechanical properties of the microfabricated contact test cantilevers. During testing the contact force, deformation, and contact adhesion are measured. Periodic observations of material transfer are made. The cycling rate can reach 200 kHz.
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