Ion vapor-deposited Aluminum Coating inside the Hollow Tube

摘要

Aluminum was coated by ion vapor deposition on the inner surface of hollow tube with inner diameter ranging from 6.5 to 22 mm with an aiming at extending the application of the technology. The process utilized the plasma as the intermediate medium in order to improve the adhesion and thickness uniformity. The coating structure was examined by SEM and X-ray, and showed (200) preferred orientation independent of applied bias voltage. The penetration depth increased linearly with tube diameter and elevated operating pressure. The effect of deposition parameters on microstructure and penetration depth of coating was mainly discussed.