A ROOM TEMPERATURE HYDROGEN SENSOR WITH HIGH SENSITIVITY AND SELECTIVITY USING NANOCRYSTALLINE SEMICONDUCTOR PARTICLES

摘要

Micro hydrogen sensor with interdigitated electrodes and indium doped nanopolycrystalline SnO_2 particles was fabricated and tested. Giant sensitivity as high as 10~5 with good repeatability and recovery was observed. The sensor showed an excellant selectivity of hydrogen (H_2) sensing over helium (He).