Formation of two-dimensional photonic crystals by electron-beam lithography

机译：通过电子束光刻形成二维光子晶体

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The approach to formation of two-dimensional photonic crystals with preset sizes of elements by the electron-beam lithography (EBL) is presented. The main problems appearing during formation of these structures are considered.

机译：提出了通过电子束光刻（EBL）预设元件的二维光子晶体形成二维光子晶体的方法。考虑了在形成这些结构期间出现的主要问题。

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《International Conference and Seminar on Micro/Nanotechnologies and Electron Devices》|2011年||共3页
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Utkin Dmitry E.; Nasimov Dmitry A.;
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中图分类 TB383-53;
关键词
Photonic crystal; lithography; proximity effect;

机译：光子晶体;光刻;光刻;邻近效果;

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1. Investigation of SOI photonic crystals fabricated by both electron-beam lithography and nanoimprint lithography [J] . M. Belotti, M. Galli, D. Bajoni, Microelectronic Engineering . 2004,第Jun期

机译：电子束光刻和纳米压印光刻技术制备的SOI光子晶体的研究
2. Photonic crystals in polymers by direct electron-beam lithography presenting a photonic band gap [J] . Roberto R. Panepucci, Bryan H. Kim, Vilson R. Almeida, Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures . 2004,第6期

机译：通过直接电子束光刻技术在聚合物中的光子晶体呈现出光子带隙
3. Polymer-Based Photonic Crystals Fabricated with Single-Step Electron-Beam Lithography [J] . Cen-Shawn Wu, Chih-Fu Lin, Hung-Yi Lin, Advanced Materials . 2007,第19期

机译：单步电子束光刻技术制备的基于聚合物的光子晶体
4. Formation of two-dimensional photonic crystals by electron-beam lithography [C] . Utkin Dmitry E., Nasimov Dmitry A. 2011 12th International Conference and Seminar on Micro/Nanotechnologies and Electron Devices . 2011

机译：电子束光刻法形成二维光子晶体
5. Pattern-Integrated Interference Lithography: Single-exposure formation of photonic-crystal lattices with integrated functional elements . [D] . Burrow, Guy Matthew. 2012

机译：图案集成干涉光刻：具有集成功能元件的光子晶体晶格的单曝光形成。
6. Ultraviolet Laser Lithography of Titania Photonic Crystals for Terahertz-Wave Modulation [O] . Soshu Kirihara, Koki Nonaka, Shoichiro Kisanuki, 2018

机译：用于太赫兹波调制的二氧化钛光子晶体的紫外激光平版印刷
7. Direct electron-beam lithography on opal films for deterministic defect fabrication in three-dimensional photonic crystals [O] . Ferrand, P., Seekamp, J., Egen, M., 2004

机译：蛋白石膜上的直接电子束光刻技术，用于确定性制造三维光子晶体中的缺陷

Formation of two-dimensional photonic crystals by electron-beam lithography

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