Nanotexturing of ceramic products surface by means of low-energy electron and laser exposure

摘要

Results of research of near-surface layer of aluminum oxide ceramics thin plates were presented. Layers were produced by treatment of electron beam (5 keV energy) — electron beam treatment (EBT) — and laser beam (1.06 um wavelength) exposure — laser treatment (LT). The composition and structure of near-surface layer were researched by methods of electron microscopy, X-ray structure analysis and IR Fourier spectroscopy. It was shown that in case of LT the chevron texture occurred as a result of ceramics melting with following recrystallization in 110 direction. In connection with this fact potentialities of directed alteration of surface texture appear. It can be performed by changing of laser beam power density and its scanning speed. Mechanical properties of modified layers were researched by method of microhardness indentation with use of Vickers diamond pyramid. It has been established that destruction viscosity factor increases up to 6% at the expense of compressing elastic stress occurrence due to processes of melting and crystallization.