Optimization of surface treatment of SOI-nanowire sensors

机译：优化SOI纳米线传感器表面处理的优化

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摘要

Several types of chemical treatment aimed at removing surface contamination and stabilizing charge state of SOI-NW sensors were tested. The effective charge on the surface allowing to select the optimal treatment of the sensor surface after prolonged storage was selected.

机译：测试了旨在去除表面污染和稳定电荷状态的若干类型的化学处理进行了测试。选择后表面的有效电荷允许在长时间储存后选择传感器表面的最佳处理。

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《International Conference and Seminar on Micro/Nanotechnologies and Electron Devices》|2011年||共3页
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作者
Malyarenko Nikolay F.; Naumova Olga V.; Zhanaev Erdem D.; Popov Vladimir P.;
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中图分类 TB383-53;
关键词
SOI nanowire sensors; surface treatment;

机译：SOI纳米线传感器;表面处理;

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Optimization of surface treatment of SOI-nanowire sensors

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