Diaphragm-type miniature optical fiber pressure sensor with a sleeve

摘要

A diaphragm-type optical fiber pressure sensor, which has a sleeve for fiber insertion, is proposed and the fundamental characteristic of this sensor is demonstrated. The diaphragm with the sleeve is suitable for highly reliable and easy bonding between the sleeve and the optical fiber. The light intensity changes through a Fabry-Perot interferometer according to the pressure observed. A method for mass production of the developed diaphragm will be useful to realize a low cost pressure sensor.