Investigation of the electrophysical characteristics of a microwave resonator type plasma generator with partial plasma filling of resonating volume

摘要

The results of measuring a series of the electrophysical characteristics determining the operation of the microwave plasma generator on the base of the rectangular shape resonator with partial filling of resonating volume with plasma are presented. It was established that the allocation of a microwave field and local electrical plasma conductivity according to the length of the discharge area carries periodic character with alternating maximums and minimums. The changes of temperature values have a rather smooth shape with a small rise near the place of microwave energy input to the resonator. Because of a space inhomogeneity in parameters of the microwave discharge, the plasma generators of the given type are reasonable to be used for such non-precision processes of plasma processing as an interoperating processes for activation of substrate surfaces of the integrated circuits, cleaning from lacquers and polish, plasma-chemical removal of photoresist film coats, etc at the density values of microwave power brought to the discharge up to 7·10{sup}4 W/m{sup}3.