Thermal micro flow sensor

摘要

The micro flow sensor was developed. The flow sensor is corrosion resistant owing to making all wetted surfaces as glass and placing sensing elements in non-wetted areas by MEMS process. On response to user needs, measurable high flowrate range was expanded by Time-of-Flight method and the flow sensor was downsized. Original flow sensor fulfilled targeted accuracy in high flowrate range while downsized flow sensor also fulfilled the accuracy in low flowrate range. The channel length is crucial to determine the accuracy. Evaluation results of multiple number of the flow sensor assure a large-lot production. Various organic solvents were confirmed usable.