Fractography, Microstructure and Thermal Stability of Multilayer CN{sub}x/TiN Composite Films Prepared by DC Reactive Magnetron Sputtering

摘要

In this paper, the multilayer CN{sub}x/TiN composite films on high-speed steel substrate were prepared by using a multi-arc assisted dc reactive magnetron sputtering system. The fractography, microstructure and thermal stability of the films were studied systematically by using scanning electron microscopy (SEM), Raman spectroscopy, micro-hardness and scratch instrument. It was found that the film had a smooth brittle fracture surface due to its superhigh hardness, and the thin film (about 1～3 μm thickness) showed higher adhesion strength than a thick one (about 8 μm thickness). The annealing tests indicated that the mechanical properties, such as hardness and adherence force, and Raman spectra were changed greatly at around the temperature 400°C, which was corresponding to the CN{sub}x decomposition and carbon interdiffusion in film.