Evaluating the Robustness of an Algorithm Determining Key Parameters of Resonant Sensors

摘要

Resonating sensors are commonly used for various measurement tasks, e.g., as microbalances as well as for viscosity and density measurements of viscoelastic media. The monitored parameters usually are the resonance frequency and the quality (Q) factor of the mechanical resonance which is measured electrically. The measurement is affected by parasitic effects induced by the sensor design but also by the measurement setup. Accurate calculation of resonance parameters from measured sensor data then is one of the most crucial points affecting measurement precision of such sensor systems. In this contribution we demonstrate the performance of a recently proposed algorithm used to accurately determine resonance frequency and Q-factor from sensor data that is significantly disturbed by parasitic sensor effects.