Miniaturized electrochemical cells for sensing applications: Silicon device containing three planar microelectrodes for electrochemical sensing

摘要

In this paper we describe silicon miniaturized electrochemical cells composed by three planar microelectrodes. The cells are embedded on PCB board for the electrical driving and reading. The microelectrodes are produced using the VLSI technology, in particular the counter and reference are made of gold, while the working microelectrodes was manufactured in platinum and nickel depending the application. The device contains also heater and sensors for temperature control and measurement.