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An optical fiber extrinsic Fabry-Perot interferometer based displacement sensor with centimeter measurement range

机译:基于光纤外部法布里-珀罗干涉仪的位移传感器,测量范围为厘米

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A low-cost and robust extrinsic Fabry-Perot interferometer (EFPI) based optical fiber displacement sensor with a wide measurement range, up to cm level, is reported in this paper. A gold-coated reflective mirror fixed inside the metal shell of the sensor, together with the endface of a single mode fiber form a Fabry-Perot cavity. The optical fiber is supported and oriented by a fiber ceramic ferrule, and the sensor is packaged and protected by a metal shell. A triangle geometry based displacement transfer mechanism is employed in the constructed sensor which makes the sensor capable of measuring wide-range displacement, and this triangle geometry based structure allows the measurement range of the sensor to be flexibly adjusted. When the measurement handgrip of the sensor experiences a displacement, the cavity length will change due to the triangle geometry design. By tracking the change in the reflection spectrum, the displacement can be determined. The experimental results show that a displacement measurement sensitivity of 42.68 nm/μm (change in EFPI cavity length/displacement magnitude) over a measurement range of 2.0 cm was achieved by the constructed prototype sensor. The present wide-range displacement sensor with low cost, high robustness has a great potential in the chemical-oil industry, the construction industry.
机译:本文报道了一种低成本,坚固耐用的基于外部法布里-珀罗干涉仪(EFPI)的光纤位移传感器,其测量范围宽至厘米级。固定在传感器金属外壳内部的镀金反射镜与单模光纤的端面一起形成Fabry-Perot腔。光纤由纤维陶瓷套圈支撑和定向,传感器由金属壳封装和保护。在所构造的传感器中采用基于三角形几何形状的位移传递机构,这使得该传感器能够测量大范围的位移,并且这种基于三角形几何形状的结构允许灵活地调节传感器的测量范围。当传感器的测量手柄发生位移时,由于三角形的几何设计,腔体长度将发生变化。通过跟踪反射光谱的变化,可以确定位移。实验结果表明,所构建的原型传感器在2.0 cm的测量范围内实现了42.68 nm /μm的位移测量灵敏度(EFPI腔长度/位移大小的变化)。当前的低成本,高耐用性的宽范围位移传感器在化学石油工业,建筑工业中具有巨大的潜力。

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