The multistep registration(MSR) method in is to register two different classes of sensors deployed on z-arm of CMM(coordinate measuring machine): a video camera and a tactile probe sensor. In general, it is difficult to obtain a very precise registration result with a single common standard, instead, this method is achieved by measuring two different standards with a constant distance between them two which are fixed on a steel plate. Although many factors have been considered such as the measuring ability of sensors, the uncertainty of the machine and the number of data pairs, there is no exact analysis on the squareness between the x-axis and the y-axis on the xy plane. For this sake, error analysis on the squareness of multi-sensor integrated CMM for the multistep registration method will be made to examine the validation of the MSR method. Synthetic experiments on the squareness on the xy plane for the simplified MSR with an inclination rotation are simulated, which will lead to a regular result. Experiments have been carried out with the multi-standard device designed also in, meanwhile, inspections with the help of a laser interferometer on the xy plane have been carried out. The final results are conformed to the simulations, and the squareness errors of the MSR method are also similar to the results of interferometer. In other word, the MSR can also adopted/utilized to verify the squareness of a CMM.
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