Validation testing of anti-vibration apparatus using switching control by DI value meter

摘要

The conventional semiconductor exposure machine (SEM) has problems concerning earthquakes. The anti-vibration apparatus (AVA) in the SEM is needed to suppress vibrations to increase the accuracy of the semiconductor. Therefore, the transmissibility from the floor to the table has been improved to be low value, using floor-vibration feedforward. However, the machines mounted on the AVA move large and then collide with neighboring components when the low-frequency earthquakes occur, because the transmissibility and the displacement of the table have trade-off. To overcome the issue, this paper considers the switching control strategy. In this method, controls of the AVA are switched in accordance with the spectrum of earthquakes. To measure the spectrum, Destructive Intensity (DI) value is employed in this paper. The effectiveness of the switching strategy using DI value is shown by experiments.