Magnetically coupled resonators for rate integrating gyroscopes

摘要

This work demonstrates for the first time the use of magnetic field to couple mechanical resonators that can be separated by long distances (8mm in this work) compared to coulombic/electrostatic coupling (∼ 1 nm – 1 µm depending on the surface charge density or E-field). The resonators were composed of electroplated copper cantilevers with proof-mass resulting in 1 kHz resonant frequency when uncoupled. The coupling magnetic field was produced by 1 mT rare earth magnets mounted on the resonators. Electrostatic actuation and sensing was used to excite and sense the collective motion of the coupled resonators. The radial motion of the resonators in the presence of an in-plane rotation gives rise to the Coriolis force. Thus, the rotation changes the rate of energy exchange between the coupled resonators enabling rate integrating gyros.