Silicon chip based near-infrared and mid-infrared optical spectroscopy for volatile organic compound sensing

摘要

We compared different on-chip silicon based absorption sensors for the detection of xylene in water in both near-infrared and mid-infrared with detection limit down to 1ppb. Strip waveguide, slot waveguide and PC-based chip integrated optical absorption spectroscopy devices are compared in near-infrared and mid-infrared. The results provide a route for enhanced sensitivity while retaining device miniaturization.