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Fabrication of 3D carbon structures based on C-MEMS technique (invited speaker)

机译:基于C-MEMS技术的3D碳结构制造(邀请扬声器)

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Facile and low-cost strategies are devised for large-scale manufacturing of three-dimensional (3D) large surface area and high-aspect-ratio carbon structures using UV photolithography process along with pyrolysis process. Moreover, combined with self-assembly process, oxygen plasma etching process, film sputtering process, or electrochemically deposition process, various 3D large surface area carbon structures are obtained, including suspended glassy-like carbon microelectrodes, nanowrinkles integrated carbon microstructures, micro/nano dual-scale carbon array, etc. These large surface area carbon structures show great potentials in the fields of chemical and biological sensors, surface-enhanced Raman scattering, and energy storage devices such as micro-supercapacitors, micro-batteries and fuel cells. This paper provides an overview of our research on large-scale fabrication of 3D large surface area carbon structures.
机译:使用UV光刻工艺以及热解过程,设计了适用于三维(3D)大表面积和高纵横比碳结构的大规模制造的展开和低成本策略。此外,与自组装工艺,氧等离子体蚀刻工艺,薄膜溅射工艺或电化学沉积工艺相结合,获得各种3D大表面积碳结构,包括悬浮的玻璃状碳微电极,纳米线集成碳微结构,微/纳米双重 - 碳阵列等。这些大表面积碳结构在化学和生物传感器,表面增强的拉曼散射和诸如微型超级电池,微电池和燃料电池的能量存储装置中显示出很大的潜力。本文概述了我们对大型大型表面积碳结构的大规模制造的研究。

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