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Effect of Bonded Ball Shape on Gold Wire Bonding Quality Based on ANSYS/LS-DYNA Simulation

机译:基于ANSYS / LS-DYNA仿真的粘合球形状对金线键合质量的影响

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Gold wire bonding processes on Cu/low-K dies are simulated with two sequential bonding processes: capillary lowering down and USG power bonding. The major purpose of this modeling is to verify one engineering fact in wire bonding: bonded ball shape has significant impact on the IMC performance, i.e., the bond quality. In this study BBR is defined as the ratio of the bond ball height (BBH) to bond ball diameter (BBD) and regarded as the basic feature of bonded ball shape. The simulation results indicate that BBR at 25% has the highest appearance frequency of tensile strain in bond interface, and the appearance frequency of tensile strain decreases with BBR increasing from 25% to 45%. Since high appearance frequency of tensile strain in bond interface may cause good IMC, the BBR at 25% could be the best for IMC performance and bond quality. This conclusion from simulation is almost coincident with all gold wire bonding practices where the BBR needs to be kept around 25% for the best bonding performance.
机译:用两个顺序粘合工艺模拟Cu / Low-K模具上的金线键合工艺:毛细管降低和USG电力键合。该建模的主要目的是验证引线键合中的一个工程事实:粘结的球形对IMC性能的显着影响,即键合质量。在本研究中,BBR被定义为键合球高度(BBH)与键合球直径(BBD)的比率并被视为粘合球形状的基本特征。仿真结果表明,25%的BBR具有粘合界面中拉伸应变的最高外观频率,并且拉伸应变的外观频率随BBR的增加而增加到25%至45%。由于粘合界面中拉伸应变的高外观频率可能导致良好的IMC,25%的BBR可能是IMC性能和粘合质量的最佳状态。从模拟结论几乎与所有金线键合法都一致,其中BBR需要保持在最佳粘合性能约为25%。

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