Practical and Theoretical Study on the High-Precision Self-sensing Piezoelectric Actuator Control with a Differential Detection Method

摘要

We present a self-sensing control method for piezoelectric actuators, which enables high-resolution positioning without an external positioning sensor. In the previous studies, a linear relationship between piezoelectric displacement and permittivity change was discovered, and this linear relationship was applied for positioning control. To detect permittivity changes, a high frequency voltage signal (permittivity detection voltage), in addition to the driving voltage signal, was applied to the actuator. The permittivity change was monitored as the amplitude of the current at the same frequency as the permittivity detection voltage. From this current amplitude, the permittivity change was easily calculated in real time. However, the positioning resolution was insufficient compared to that of traditional external positioning sensors, such as a strain gage sensor. In this study, we improved the positioning resolution by introducing a differential current measurement using two piezoelectric elements, one on each side of a bimorph actuator. With these improvements, the permittivity change related to the piezoelectric displacement could be measured precisely, and self-sensing feedback control with a positioning error of less than 0.4 μm over a movement range of 80 μm was demonstrated.