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DRY-TYPE OFF-GAS TREATMENT TECHNOLOGY OF EXHAUST GASES FROM THE SEMICONDUCTOR INDUSTRY FOR FLUORINE RECYCLING

机译：回收利用半导体行业废气的干式尾气处理技术

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来源
《AIChE annual meeting》|2011年|p.1-9|共9页
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作者
Shinji Yasui; Syunpei Yamaji; Tsukuri College; Tadashi Shojo; Goichi Inoue; Kunihiko Koike; Iwatani Corp; Shiga Japan; Akihiro Takeuchi; Yoshio Iwasa;
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中图分类化工过程（物理过程及物理化学过程）;化工过程（物理过程及物理化学过程）;
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2. Gas-Solid Reaction Properties of Fluorine Compounds and Solid Adsorbents for Off-Gas Treatment from Semiconductor Facility [J] . ShinjiYasui, TadashiShojo, GoichiInoue, International journal of chemical engineering . 2012,第1期

机译：氟化合物和固体吸附剂的气固反应性，用于从半导体设施的废气处理
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4. DRY-TYPE OFF-GAS TREATMENT TECHNOLOGY OF EXHAUST GASES FROM THE SEMICONDUCTOR INDUSTRY FOR FLUORINE RECYCLING [C] . Shinji Yasui, Syunpei Yamaji, Tsukuri College, AIChE annual meeting . 2011

机译：干式废气处理技术从半导体行业氟回收的废气
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7. Gas-Solid Reaction Properties of Fluorine Compounds and Solid Adsorbents for Off-Gas Treatment from Semiconductor Facility [O] . Shinji Yasui, Tadashi Shojo, Goichi Inoue, 2012

机译：氟化合物和固体吸附剂的气固反应性，用于从半导体设施的废气处理
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机译：为半导体行业生产高价值氟气体。小企业创新研究计划第二阶段最终报告。

DRY-TYPE OFF-GAS TREATMENT TECHNOLOGY OF EXHAUST GASES FROM THE SEMICONDUCTOR INDUSTRY FOR FLUORINE RECYCLING

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