The coupling error analysis of the decoupled silicon Micro-Gyroscope

摘要

This paper deal with a new symmetrical and Decoupled Silicon Micro-Gyroscope (DSMG). By the simplified motion model of the DSMG, the mechanical coupling error from the width errors of suspension beams is analyzed and deduced. The simulation shows that the simulated results of mechanical coupling error basically equal to the calculation results. The characterization test results of the DSMG show that the equivalent input rate of mechanical coupling error is 31°/s, 13.9 times smaller than that of the part-decoupled SMG developed by our research group in an earlier stage. The experiment results show that the zero bias temperature coefficient of the DSMG is 57.68deg/h/°C, 9.42 times smaller than the part-decoupled SMG. The decoupled structure reduces mechanical coupling error between the drive-mode and sense-mode of DSMG, which decrease the zero-rate output drift.