Research on a new Microelectromechanical Hybrid Gyroscope

摘要

Described in this paper is a new Microelectromechanical Hybrid Gyroscope(MHG), with advantages not only in the potentiality of achieving the high precision like the traditional dynamically tuned gyroscope(DTG), but also in small size and low cost like the Silicon Micromachined Gyroscope(SMG). The transfer coefficient of the moment is derived, with influence factors analyzed. A new tuning method which tuned the microelectromechanical hybrid gyroscope by negative stiffness effectiveness of the moment is adopted. An interface circuit is researched, the sensitivity equation of the interface circuit is deduced and a decoupled rebalancing control loop circuit is researched. Finally, on this basis, the prototype of the MHG is achieved. The experiment results prove that the new tuning method by negative stiffness effectiveness of the moment is feasible, and the designs of the interface circuit and rebalancing control loop are proper. The preliminary performance test of the prototype shows that the scale factor is 1.42mV/°/s, the scale factor non-linearity 2.47%and the maximum rate °200°/s, which proves that the fundamental principle of the MHG is feasible.