A closed-loop SC interface for a ±1.4g accelerometer with 0.33 nonlinearity and 2µg/vHz input noise density

摘要

A closed-loop SC interface for a ±1.4 g accelerometer together with a 1 b SC ¿¿ ADC is implemented in 0.35 ¿m CMOS. The active area is 2 mm² and the supply current and voltage are 2.4 mA and 3.6 V, respectively. The SC interface, designed for a sensor element with a high quality factor, allows the resonance peak of the element to be damped in such a way that the ADC remains outside the closed-loop accelerometer.