Among many different mechanisms that are used for excitation and detection of vibration of micro-beam resonators, electrostatic comb-drives have the benefit of simplicity and large range of linear operation. The disadvantage of using comb-drives is the effect of added mass to the beam; however, the analytical model of the beam-mass system predicts that this shortcoming can be overcome by proper adjustment of the mass, rotary inertia, and location of the comb-drive. In addition, the analytical model can predict the effect of the axial force of the beam on the resonance frequencies. In this paper, the results of the experiments on two resonators are presented. These results are used to verify the validity of the analytical model and finding its parameters. Very close agreement between the theory and experiment is observed. The residual stress of the MEMS structural layer is measured using the calibrated analytical model parameters.
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