The design, fabrication and measured characteristics of a bulk-micromachined focusing device are presented. A micro-bench is formed by 2 V-grooves which support an optical fiber and a micro-lens. A thermal actuator is integrated in the optical bench, and allows a micro-lens to be moved along the optical axis in order to adjust longitudinally its focusing spot. This device can be used for vision systems such as robotic vision or confocal microscopy. The focusing range can be adjusted between 50 mm and infinity with a 15 mA supply current.
展开▼
