With large scale integration in microelectronics, the thickness of insulation between closely spaced conductors at different potentials is reduced to the micrometer range and the electric field in the insulation becomes both a performance issue and a reliability issue. Using the thermal pulse method, we have measured for the first time the field distribution in 5 /spl mu/m thick polyimide and found complex charging behaviour at ambient temperature and low field (circa 3 V//spl mu/m) representative of operating conditions. Field-independent charge layers are observed on the front surface in addition to injected charge extending deep into the bulk from the polyimide/substrate interface. These effects are considerably influenced by moisture uptake.
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机译：随着微电子学中的大规模集成，在不同电势下紧密间隔的导体之间的绝缘层的厚度减小到微米范围，并且绝缘层中的电场既成为性能问题，也成为可靠性问题。使用热脉冲方法，我们首次测量了5 / spl mu / m厚的聚酰亚胺中的场分布，并发现了在环境温度和低场（约3 V // spl mu / m）下的复杂充电行为，代表了工作情况。除了注入的电荷从聚酰亚胺/衬底界面深入到本体之外，在前表面上还观察到了场无关的电荷层。这些影响受水分吸收的影响很大。
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