Motion Control of Electrostatic Microactuators

摘要

We examine and solve control problems for microsystems with micromachined electrostatic actuators and integrated sensors. Advanced control schemes and solutions are investigated. The designed minimal complexity control laws ensure compliance with device physics, low-power electronics and sensors. Overall consistency, accuracy, precision, fast repositioning and adequate performance are guaranteed. We achieve design practicality, control laws adequacy and hardware simplicity at the device and system levels. Nonlinear analysis and control are accomplished by using a Lyapunov stability theory. We expand the Lyapunov theory to design admissible robust control laws. The results are applicable in high-precision positioning systems, microrobotics, wearable electronics and microsurgical devices. Our findings contribute to MEMS system design compliancy, control schemes complementarity and design solutions.