Fabrication of Surface Acoustic Device Based on 2D Ruddlesden Popper Perovskite (RPP)

摘要

In this paper a Surface Acoustic Wave (SAW) device with the wavelength of $80 mumathrm{m}$ is proposed. Inter Digital Transducers (IDTs) of the device are fabricated through the photolithography method. (BA)2PbI4, a quasi 2D Ruddlesden Popper Perovskite (RPP), is used as piezoelectric material on the top of IDTs. The RF measurements of the SAW device are investigated and the resonance frequencies at 71.43 MHz and 289.83 MHz show the accurate matching of transmission (S21) and reflection (S11) spectrums.