Simulation and Fabrication of Flexible Piezoelectric and Pyroelectric Hybrid Sensors

摘要

In this paper, a flexible piezoelectric and pyroelectric hybrid sensor based on the piezoelectric effect and pyroelectric effect of polyvinylidene fluoride-trifluoroethylene (PVDF-TrFE) film was designed and prepared. The sensor has the characteristics of flexibility, high sensitivity, and self-driving. It has potential applications for electronic skins, medical detectors, robots, and other fields. The piezoelectric effect and pyroelectric effect of the sensor were simulated using the commercial finite element software COMSOL Multiphysics, and the influence of film thickness on the device performance was analyzed, as well as the relationship between the temperature conversion rate and charge response. The simulation results were verified by experiments. Combining the finite element simulation and the experimental data, the structure of the piezoelectric and pyroelectric hybrid sensor is optimized, and the device performance is improved.