PROCEDURE TO DETERMINE LINEARITY DEVIATIONS OF A LARGE RANGE VERTICAL AXIS OF TOPOGRAPHY MEASUREMENT INSTRUMENTS USING SIMPLE STEP HEIGHT STANDARDS

摘要

It could be shown that an estimation of linearity deviations is possible using a fast low-cost method for industrial routine calibration in the field. This is realized by employing a small set of related depth setting standards with its grooves being on one common object. If the uncertainties of material measures and the random positioning uncertainty of the instrument are significantly smaller than the linearity deviation, a correction of non-linearity is possible. Simulations show how to distinguish systematic and random influences and prove that a response function can be obtained for small uncertainties of the material measure and the instrument's positioning.