Transient Simulations and Analyses of Thermally Tunable Devices

摘要

we present transient simulations and analytic formulas for the thermally tunable devices with suspended waveguide. The response speeds can be improved about 10% and 40%, when the thickness of metallic heater varies from 0.08 μm to 0.16 μm and the cladding thickness increases from 0.4 μm to 1.2 μm, respectively. Moreover, replacing the cladding of silica by ones of Alumina, aluminum nitride and silicon nitride, the response speed have a significant boost, more than 65%.