Electron probe microanalysis (EPMA) is a well-established technique in microbeam and surface layer analysis. Varying the beam energy is a common method used for the analysis of laterally homogeneous multi-layered structures in EPMA. With increasing beam energy, the information depth is increasing as well. Thus, the multi beam energy acquisition delivers a possibility for depth profiling [1], On the other side, cross-section measurements are often performed at one single beam energy. This guarantees stable conditions like well-adjusted focus, astigmatism and gun alignment. With the introduction of the field emission electron microprobes the analysis of submicron features has become of more and more interest due to better focussing capabilities. Since the spatial resolution is then mainly determined by the broadening of the beam due to scattering events within the specimen, a common solution is to apply low voltage analysis, i.e., the use of one single low beam energy. However, as shown in [2], low voltage analysis has its limitations, if soft X-ray lines, i.e., La-lines of the first-row transition elements, are used.
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