Plasma Probe Measurement Control System Design

摘要

This paper studies the design scheme for the plasma probe measurement control circuit system. MSP430 SCM is employed as the control chip. The design uses two-stage amplification of the voltage outputted by DA and collects segmented and precise scanning voltage at the PA94 output end of the high-voltage operational amplifier. Finally, the voltage and current at both ends of the probe are AD-collected. The collected voltage and current measurement data are amplified by the secondary operational amplifier respectively, and then transmitted to the computer through the serial port for recording, thereby realizing accurate and precise data measurement on the plasma. (This system has obtained the national utility model patent numbered ZL201721203384.2).