Biodegradable junctionless transistors with extremly simple structure

摘要

Biodegradable junctionless transistors with extremely simple structure are fabricated at room temperature. The free-standing sodium alginate (SA) membrane is used as both a substrate and the dielectric layer for the transistors. The source/drain electrodes and the channel region are made of one single patterned Al:ZnO (AZO) thin film. The proposed transistors can be operated at a low voltage of 1 V. Dissolution tests of those transistors in deionized water demonstrate their completely physical transience within 60 minutes. The operation mode of such transistors can be effectively tuned from depletion mode to enhancement mode by varying the thickness of the AZO film. Moreover, a resistor-loaded invertor was demonstrated by connecting those transistors in series with a 3 MQ resistor.