Flexible magnetic sensor based on FBAR

摘要

Film bulk acoustic wave resonator (FBAR) is widely-used as RF filter or sensor due to its high frequency and Q-factor. This paper demonstrates the feasibility of FBAR as flexible magnetic sensors, like sticker. The proposed Sensor has a ZnO piezoelectric sandwich structure with magnetostrictive nickel (Ni) electrodes on the Polyimide (PI) substrate. The characteristics of the magnetic sensors have been investigated experimentally and theoretically. The testing results show its sensitivity is about 100Hz/Gs.