PLASMA TREATMENT NANOSTRUCTURING OF Cu(In,Ga)Se_2 FILMS GROWN BY SELENIZATION AND PULSED LASER DEPOSITION

摘要

In this work we report a novel approach to the nanostructuring the surface of Cu(In,Ga)Se_2 thin films grown by selenization process and pulsed laser deposition. Our approach is based on using argon inductively coupled plasma sputtering technique with 200 eV ion energy. We performed morphology studies using scanning electron microscopy and atomic force microscopy, which allowed describing the formation of uniform nanostructures and their geometrical parameters in dependence on film growth method and treatment duration.