Simulation and Measurement of Angle Resolved Reflectance from Black Si Surfaces

摘要

In this work angle-resolved reflectance from nanostructured Si surfaces realized by maskless RIE texturing has been simulated and measured. The simulation and experimental measurement data show the same trend. Experimentally a total reflectance below 1% for incident angles below 30° and specular reflectance below 0.1% at incident angles below 70° is seen. In both simulation and experiment the specular reflectance is below 10% at incident angles below 65° and below 1% at incident angles below 45° in the case of non-linear graded refractive index. From the simulation results the non-linear graded refractive index yields lower reflectance than the linearly graded refractive index.