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Theoretical Investigation and Modeling of Current Extraction from a Radio-Frequency Cathode

机译:射频阴极电流提取的理论研究与建模

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Plasma cathodes are electron sources which use a plasma discharge in order to extract electrons. Plasma discharge of these cathodes is produced by various methods. The device takes its name from the method of plasma generation. After plasma generation, an extraction set up is used in order to obtain electron current from the bulk plasma. Extraction of electrons from a plasma cathode device is related to the bulk plasma parameters as well as the extraction apparatus geometry. So, the theory of radio frequency cathode consist of two parts: first, modeling a quasineutral inductively coupled plasma and second, modeling of plasma sheath and effects of applying a bias voltage on the plasma. Theory of quasineutral inductively coupled plasma has been developed widely and some zero-dimensional and multi-dimensional models have been introduced by numerous scientists. In contrast, theory of applying a positive potential and electron current extraction from a bulk plasma is considered in recent years. For this reason, there are limited models that can be used in this field. In this study, a novel 0-D model is proposed for numerical investigation of the current extraction mechanism of plasma cathode device. Also, a DC circuit is developed which models the electron current traveling from the grounded electrode to the positive electrode of the DC power source.
机译:等离子体阴极是使用等离子体放电以提取电子的电子源。这些阴极的等离子体放电通过各种方法产生。该设备的名称来源于等离子体的产生方法。在产生等离子体之后,使用提取装置以从整体等离子体中获得电子电流。从等离子体阴极装置中提取电子与整体等离子体参数以及提取装置的几何形状有关。因此,射频阴极的理论包括两部分:第一,模拟准中性电感耦合等离子体,第二,模拟等离子体鞘层以及在等离子体上施加偏置电压的效果。准中性电感耦合等离子体的理论已得到广泛发展,许多科学家已经引入了一些零维和多维模型。相反,近年来考虑了从体等离子体施加正电势和电子电流提取的理论。因此,在该领域中只能使用有限的模型。在这项研究中,提出了一种新型的0-D模型,用于对等离子阴极装置的电流提取机理进行数值研究。而且,开发了一种DC电路,该DC电路对从接地电源到DC电源的正电极行进的电子电流进行建模。

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