Formation of microano-metric holes/voids in Al2O3-coated boro-aluminosilicate glass by single pulse femtosecond laser irradiation

摘要

In this paper, we report the formation of periodic array of microano-scale holes/voids on the surface of and inside AlO-coated boro-aluminosilicate glass by means of single pulse femtosecond laser irradiation. The lowest diameter of the nano-holes printed on the AlO coating reaches down to 700 nm, whereas the lowest diameter of the voids inside the glass was 1.1 μm. The fabricated microano-metric holes and voids show uniformity in size and shape throughout the sample area. We also investigate the surface property of the nanovoids' evolved glass surface. We don't observe any structure on the sample surface, when the voids have been evolved inside the glass sample. In addition, we investigate the formation mechanism of the microano-holes or voids in our double-layer samples. We strongly believe that, the periodic microano-voids array will be useful in fabricating various photonic/optical devices, especially, in spreading light.