Friction Experiment Study on the Standing Wave Linear Piezoelectric Motor Macro Driven

摘要

The rapid development of chip packaging industry has made higher demands for the positioning accuracy, speed of movement and acceleration of packaging equipment at the same time, but the positioning accuracy is contradicted against the improvement of speed of movement. The macro and micro drive standing wave linear piezoelectric motor uses the friction of the contact interface for energy conversion and power transmission, it will convert the vibration of the stator to the macro linear motion of the rotor or convert the static deformation of the stator to the micro linear motion of the rotor, then the motor will drive the load to work, which solves the contradiction of the positioning accuracy and the speed of movement. In order to improve the macro and micro linear piezoelectric motor driving force, enhance the motor operation stability and extend the motor working life, this paper studies the influence rule of the friction pair that consists of different friction materials on the motor performance by applying different friction materials on the contact interface, thus proposes the method of the improve of motor output power and the improve of the stator and the rotor contact state, and provides useful experience to design a kind of macro and micro drive linear piezoelectric motor with a good performance.