Research on aspheric focusing lens processing and testing technology in the high-energy laser test system

摘要

In the high-energy laser test system, surface profile and finish of the optical element are put forward higher request. Taking a focusing aspherical zerodur lens with a diameter of 100mm as example, using CNC and classical machining method of combining surface profile and surface quality of the lens were investigated. Taking profilometer and high power microscope measurement results as a guide, by testing and simulation analysis, process parameters were improved constantly in the process of manufacturing. Mid and high frequency error were trimmed and improved so that the surface form gradually converged to the required accuracy. The experimental results show that the final accuracy of the surface is less than 0.5μm and the surface finish is□, which fulfils the accuracy requirement of aspherical focusing lens in optical system.