Transfer-Printed NEMS Tunable Fabry Perot Filter for Mid-Infrared Computational Spectroscopy

摘要

Miniaturized optical spectrometer in the mid-infrared range could open numerous opportunities for widespread applications including environmental monitoring and biosensing. A recent scientific advance in this field is the computational spectrometer based on the wavelength reconstruction method, which features an ultracompact footprint. However, the existing techniques still need multiple pixel arrays which inevitably increases the device complexity and footprint. Here, we demonstrate a transfer-printed nanoelectromechanical Fabry-Pérot filter with electrical configurability, implementing a single-pixel computational spectrometer. The tunable wavelength of our filter spans from 5.61 to $4.13 mu mathrm{m}$ with drive voltages from 0 V to 70 V. As a proof of concept, our device can successfully reconstruct the absorption peak of CO2 at $4.26 mumathrm{m}$ wavelength. Our work lends the function of configurability to emerging computational spectrometers, highlighting the promising potential of this technology.