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Low pressure gas discharge in the quasioptical beams of the powerful terahertz radiation

机译:强大的太赫兹辐射的拟光束中的低压气体放电

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Results of the experimental investigation of the gas discharge in the beams of the powerful terahertz radiation are presented. Study of the self-sustained and initiated discharges by using the radiation of one of the two pulsed gyrotrons (developed in IAP RAS) with frequency values of 0.55 THz@1kW (8 μs pulse length) and 0.67 THz@100kW (20 μs) was made in the wide range of pressures (0.01–1500 Torr) in different gases (helium, argon). Self-sustained discharge could be maintained in the pressure range from 20 Torr to two atmospheres. By using the several methods of discharge initiation it was possible to expand the range of discharge existence to the pressure value of about 0.01 Torr. It was shown that the low pressure (dozens of Torr and less) discharge has a number of features compared with the discharge of high pressure: the presence of the powerful afterglow with length of about 20–50 microseconds after gyrotron pulse, the lack of a strongly inhomogeneous spatial structure of the discharge glow (at pressures less than 10 Torr), the lack of screening of the discharge appearance location from the gyrotron radiation. The size of the discharge plasma at pressure value of 0.01 Torr was about of 1 mm. Such a discharge can be used as the pointed source of UV radiation, including the projection lithography.
机译:提出了强大的太赫兹辐射梁气体排放的实验研究结果。通过使用0.55至1kw(8μs脉冲长度)和0.67 thz(20μs)的频率值,通过使用0.55 thz @ 1kw(8μs脉冲长度)和0.67 thz(20μs)的频率值的辐射来研究自我持续和发起的放电在不同气体(氦气,氩气)中的各种压力(0.01-1500托)制成。自持续放电可以维持在20托的压力范围内,从20托到两个大气中。通过使用几种放电启动方法,可以将放电的范围扩展到约0.01托的压力值。结果表明,与高压放电相比,低压(数十个托和较少)的放电具有许多特征:陀螺脉冲后长度为约20-50微秒的强力余辉的存在,缺乏a放电辉光的强烈不均匀的空间结构(小于10托的压力),缺乏从陀螺辐射的放电出现位置的筛选。压力值为0.01托的放电等离子体的尺寸约为1mm。这种放电可以用作UV辐射的尖源,包括投影光刻。

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