Fabrication of Large-Scale Suspended Graphene Clamp-Clamp Beam by FIB Cutting

摘要

In this study, suspended graphene clamp-clamp beam (SGCCB) as long as 100 μm was manufactured by FIB cutting. Large-scale graphene film was grown on Cu foil by CVD and transferred to DRIE defined silicon substrate. The influence of FIB cutting time and ion beam intensity on the pattern profile were investigated with an optimized processing recipe. The SGCCBs revealed a sharp edge, which can be used for gas molecule sensors, resonator and many other fields.